Spectra of electrons
reflected from the
Nb/Si two-layer
targets Nb/Al/Nb/Si multilayer
targetsnitrogen
implanted Nb targetNb/Al-AlOx/Nb
structureTheoretical interpretation
Single-deflection
model & Continues slowing down approximation
Consistent
solution of elastic and inelastic problems
Πθρ.1 Fig. 1. Reflected electron spectra
q0
incident angle,
q - reflection angle, x
thickness of Nb-layer, E0 energy of incident
electrons, R reflection function, e
- mean energy losses (averaged by electron path).
Consistent
solution of elastic and inelastic problems The calculation of electron energy spectra reflected from
heterogeneous in depths targets is based on formulas (7),
(9),
(10), (14).
Fig.2. Reflected electrons spectra Solid line shows experimental data, dashed line
calculation for two-layer model.
Varying of the top Nb-layer thickness for each target the Nb-layer
thickness has been obtained that fits experimental data best (fitting-procedure). Nb-layer
thicknesses found with a help of fitting-procedure are as following:
x1=93 nm, x2=63, x3=29 nm.
Fig.3 Fitting-procedure There are only thicknesses of the layers which varied
in fitting-procedure. The model as such together with all its parameters
has been kept constant. Solid line experiment data, dashed line
calculation.Fitting
Single-deflection model &
Continuous slowing down approximation
